• OLUS (Dummy Load Port System)
  • OLUS (Dummy Load Port System)
  • OLUS (Dummy Load Port System)

OLUS (Dummy Load Port System)

OLUS communicates with OHT by SEMI E84 protocol. Set with RFID or Barcode identified system. Two load ports on one OLUS, one for input and one for output. After receiving the command, OHT will load specific FOUP on OLUS. At the other side, operators can place FOUP on the upload section and inform OHT to pick up the specific FOUP.
Product Specification
4-Port FOUP OLUS:
  • Dimension: L-150 W-55 H-200 cm
  • Weight: 100 KG
  • Standard Specification.: E84 communication, 11.7" HMI, 4-colors signal tower
  • ID system option: RFID, Barcode
2-Port FOUP OLUS:
  • Dimension: L-120 W-50 H-120 cm
  • Weight: 70 KG
  • Standard Specification.: E84 communication, 7" HMI, 4-colors signal tower
  • ID system option: RFID, Barcode
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Photo Description

Product Specification

4-Port FOUP OLUS:
2-Port FOUP OLUS:

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