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Language
English
繁體中文
日本語
About Us
About Synergy
Products
N2/XCDA Purge System
OHB/ZFS/OHC
Tool Load Port
Stocker
FOUP Rack
Reticle Rack
OLUS
FOUP OLUS
Reticle OLUS
ID Track System
Smart E-Rack
ID Read Station
Air Curtain
Application
Advance-process Material Air Purge System
Grouping management Concept for OHC System
OHT Traffic Controller
News
FAQ
Contact Us
Inquiry
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+886-4-2258-0250
service@synergy-tech.com.tw
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N2/XCDA Purge System
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Tool Load Port
Internal N2 Tool Load Port
External N2 Tool Load Port
Stocker
N2 Stocker Retrofit
Inline Stocker Gas Purge System
FOUP Rack
E-Rack with Gas Purge
FOUP/ FOSB N2 Purge System
Reticle Rack
Reticle Pod N2 Purge
OLUS
FOUP OLUS
OLUS (Dummy Load Port System)
Reticle OLUS
EUV Pod OLUS with N2 Purge
ID Track System
Smart E-Rack
ID Read Station
OHB FOUP ID Read Station
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Advance-process Material Air Purge System
Grouping management Concept for OHC System
OHT Traffic Controller
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