OHC/ OHB/ ZFS Gas Purge System

This product has been widely applied in the Automatic Material Handling System (AMHS) department. The purpose is to decrease the humidity and oxygen inside the FOUP. We mount a new FOUP load port which comprises multiple nozzles, sensors, KC pin, etc. on the original ZFS (Zero Foot-print Storage) or OHB (Overhead Buffer) frame. And install an additional controller which collects various values, such as air pressure, flow, humidity, oxygen, etc. Meanwhile, our GUI manager will upload value up to the Host monitoring system, to help customers improve the yield rate and to achieve better product Q-Time. Our integration experience includes DAIFUKU and MURATEC leading brands of cleanroom automatic transport systems.

Product Specification

Controller Dimension: L-46 W-25 H-37 cm
Controller Weight: 18 KG
Flow control option: Mass Flow Control, Fixed Flow Meter
Quality control option: Humidity sensor, Oxygen meter
ID system option: RFID, Barcode

Hardware Highlights

Small dimension of the controller, easy to install and maintain. (Footprint- L-46 W-25 H-37 cm)
One controller corresponds to four purge ports.
Support RS232, RS485 communication protocol, RJ45 Ethernet communication protocol.
Barcode or RFID FOUP ID identified system.
Fixed flow or Mass flow control (MFC) on purging air.
Anti-statistic Silicone material nozzles, the hydrophobic coating creates a barrier against dirt. Repel dust, and particles, and easier to clean.
Equips with 7” full-color Human Machine Interface (HMI).

Software Highlights

Capable of Host remote upgrading PLC program.
Multiple parameter settings for purge volume and time, process program ID (PPID) creatable.
User-friendly UI, easy to interact with the product. The standard menu includes authority management, Chart output, Event, and Log record.
Real-time display for OHC status, automatically produces charts of flow, O2, and humidity values for User to understand the status by timeline.
Flow closed-loop function will automatically adjust purge air volume based on humidity and O2 retrospective value.