E-Rack with Gas Purge

E-Rack includes FOUP E-rack, Reticle E-rack and Shipping product E-rack. Set with Barcode or RFID FOUP ID identified system. Combine E-rack and air purge technology, offer small volume of N2 or XCDA to reduce the humidity and oxygen inside the carrier, to achieve better product yield. This combination can accomplish high efficiency purge process by using multi-layers purge plates to fulfill carriers at a time.